| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-482 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
1985-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1986-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62f836a817a09dcaa6049ee77359746f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7cf29ccab066dbd9836cda13f1f397e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5c7dfee783e8fec705346c7ad11b490
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c2443758d5ae056b1d0eb073964c060
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_953ef5790f6077805f37fc71f479b810 |
| publicationDate |
1986-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4626449-A |
| titleOfInvention |
Method for forming deposition film |
| abstract |
A method for forming a deposition film by introducing a starting gas for formation of a deposition film into a reaction chamber housing a substrate therein and forming a deposition film on the substrate by irradiation with light comprises performing deposition by using a monochromatic light and a continuous polychromatic light in combination and projecting the lights on the substrate on which the deposition film is to be formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5310624-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5308651-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5527396-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4957880-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4720395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5981001-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5830538-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5417770-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4888203-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5112647-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5200388-A |
| priorityDate |
1984-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |