http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4548834-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-817 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-819 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-0912 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24 |
| filingDate | 1983-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1985-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61c2e8c5fadacfb788a7de4648c3acb9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_155f928ce1d91faa114fe139ffc8d816 |
| publicationDate | 1985-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-4548834-A |
| titleOfInvention | Method of producing a Josephson tunnel barrier |
| abstract | A method for producing multi-layered Josephson tunnel barrier devices without an edge step between the layers comprises the steps of forming a first layer containing at least a lower layer superconducting film on a substrate, selectively removing the surface portion of the first layer, except an area where a Josephson tunnel barrier is to be formed, to a predetermined first depth, and forming a first insulating film, preferably by a high-directivity film forming method, on the removed portion of the first layer in such a thickness that the insulating film surface is substantially coplanar with the surface of the retained area of the first layer. A tunnel barrier may be subsequently formed after the third step or in advance following formation of the first layer in the first step, thereby eliminating a change in the characteristics of the tunnel barrier due to the atmosphere. Prevention of edge step is enhanced by forming a lower layer superconducting film on the substrate, patterning the lower layer superconducting film to form a first superconducting electrode, forming a first insulating film having a predetermined thickness over the entire area of the substrate, and selectively removing a surface portion of the first superconducting electrode except a predetermined portion thereof and a surface portion of the first insulating film such that any edge step between the boundary of the first superconducting electrode and the first insulating film is eliminated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5401542-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4959345-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9136457-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5055158-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9595656-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4699690-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6519123-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008231999-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111933788-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4904619-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4888203-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003015494-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10109673-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5721197-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011262769-A1 |
| priorityDate | 1982-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.