| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d7cf17ecbdffbd3602d1a158b39dd894 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N25-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N25-085 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16J3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N25-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N25-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K11-02 |
| filingDate |
1981-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1984-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0a8ac98d3a288a96eedb340e3693477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1136159d835682b01f049045343ec262 |
| publicationDate |
1984-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4466746-A |
| titleOfInvention |
Ebulliometric hot spot detector |
| abstract |
An ebulliometric hot spot detector detects hot spots with a resolution of the order of a micron on semiconductor devices. The device to be tested is operated in a suitable liquid contained in the detector, and the liquid pressure is decreased until boiling from sites on the device is observed. The liquid pressure is then increased until boiling ceases; meanwhile, the boiling sites on the device are observed. Small bubbles observed just before cessation of boiling pinpoint the hot spot locations. The pressure at which boiling ceases in a given liquid determines the hot spot temperature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10600664-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5396068-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4808867-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011094556-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4640626-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5004973-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4710707-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6842021-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6559670-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5119021-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6033107-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4964737-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5504017-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10971383-B2 |
| priorityDate |
1981-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |