| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_087bed7abab91ae0f927879f9fe8b273 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-029 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-442 |
| filingDate |
1981-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1984-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9a05a09da1b0fa32cece177a9dee6fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f14b1344decb74914dbd674177f8f7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abff2c591b6f81a17757f375f4f839ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c60bc7aa8f6714db36b61b9aa856d67e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4204af40b05754b044be25e11bec1824 |
| publicationDate |
1984-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4444811-A |
| titleOfInvention |
Fluidized bed silicon deposition from silane |
| abstract |
A process and apparatus for thermally decomposing silicon containing gas for deposition on fluidized nucleating silicon seed particles is disclosed. n Silicon seed particles are produced in a secondary fluidized reactor by thermal decomposition of a silicon containing gas. The thermally produced silicon seed particles are then introduced into a primary fluidized bed reactor to form a fludized bed. Silicon containing gas is introduced into the primary reactor where it is thermally decomposed and deposited on the fluidized silicon seed particles. Silicon seed particles having the desired amount of thermally decomposed silicon product thereon are removed from the primary fluidized reactor as ultra pure silicon product. n An apparatus for carrying out this process is also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5165908-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10829853-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10576438-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114231941-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008519754-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4820587-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4806317-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102939405-B
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0248033-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100457614-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102939405-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005054130-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012003141-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10407309-B2 |
| priorityDate |
1980-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |