| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2bb724dd58cbb2a73b244e79b0c9e42 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S118-05 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-453 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate |
1979-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1982-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab5ee6c1085fec12570af3a028f43181 |
| publicationDate |
1982-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4359493-A |
| titleOfInvention |
Method of vapor deposition |
| abstract |
A method is disclosed for fluidizing and vaporizing particulate solid coating reactants by establishing a fluidized bed of dispersed particulate solid coating reactants, drawing a volume of fluidizing gas and suspended particulate solid coating reactant into a vaporizer while mixing an additional volume of gas therewith, and vaporizing the dispersed particulate solid coating reactant in the reactant gas mixture. The vaporized coating reactant may then be directed into contact with a substrate to be coated in order to deposit a film thereon. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8507080-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005025083-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8936694-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5123972-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4662901-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005025083-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4924936-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9133365-B2 |
| priorityDate |
1977-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |