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grantDate 1982-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1982-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-4341749-A
titleOfInvention Heating method for silane pyrolysis reactor
abstract An improved method for the pyrolysis of silane in a free-space reactor. The improved method involves non-uniform heat input along the axial length of a free-space silane pyrolysis reactor so that the axial temperature profile along the length of the surrounding reactor wall is essentially constant.
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Total number of triples: 51.