| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53247 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
1979-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1981-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_356f865d158610c9655943e76c14b8a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb03ea78f280a2e64a297ad1911f7cca |
| publicationDate |
1981-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4300149-A |
| titleOfInvention |
Gold-tantalum-titanium/tungsten alloy contact for semiconductor devices and having a gold/tantalum intermetallic barrier region intermediate the gold and alloy elements |
| abstract |
In a conductor pattern for integrated circuits, the use of barrier layers of TiW and selected transition metals between gold and a silicon substrate, with the transition metal containing a supplemental barrier region or stratum of an intermetallic formed between it and the gold. Also comprehended is the use of a platinum silicide layer between the TiW layer and silicon for Schottky Barrier Diodes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4486946-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8503168-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-688472-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6211568-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5708302-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9522838-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4998158-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100376955-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4734073-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4614961-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004137158-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100313468-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4628338-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5164615-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006108672-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5294486-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5480836-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4539434-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4953003-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7569911-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9629735-A1 |
| priorityDate |
1979-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |