| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bece05f4bf21dad39845182c8112b111 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-0084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 |
| filingDate |
1979-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1981-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c67c1770e5e9e94813f25ceba62f653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f054c81d600834876d150236540f2c31 |
| publicationDate |
1981-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4287772-A |
| titleOfInvention |
Strain gage transducer and process for fabricating same |
| abstract |
A transducer which includes a metal strain gage material formed on a flexible monocrystalline silicon diaphragm is disclosed. The transducer is fabricated to a large extent with semiconductor processing steps. Gold is diffused into a platinum-tungsten gage material. This allows the gage material to be chemically etched in the presence of other metals to define the active gage resistors. In the presently preferred embodiment, these resistors are formed over thin areas of the diaphragm to provide increased linearity and sensitivity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4574327-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9714876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0405070-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0405070-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011128113-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11105698-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5117068-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10488289-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5401912-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004021402-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10871413-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4462018-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10557770-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10969288-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8186228-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10545064-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5539611-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4368575-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5049421-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6984925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3081912-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5284057-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10323998-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6973837-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03006943-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5670063-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7934430-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5522132-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10724907-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004159161-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0262366-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009114030-A1 |
| priorityDate |
1978-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |