| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b94c2b64d23b5d71cb7a4b526fda1179 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
1979-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1980-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4118057cc48d9daff3d9bd4dae5bb54b |
| publicationDate |
1980-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4234675-A |
| titleOfInvention |
Dry film photosensitive resist |
| abstract |
A dry film photosensitive resist, according to the invention, is a flexible laminated structure consisting of three layers of which the first is a transparent polymer film transmitting UV radiation and having a thickness of 5-100μ; the second of said layers being a light-sensitive layer having a thickness of 5-1,000μ and comprising a combination of a carboxyl-containing polymer-thickener, a polar oligomer, and a monomeric substance having a boiling point above 200° C. at 760 mm Hg; the third of the layers being a film from a polymeric substance having a thickness of 5-100μ, the last-mentioned layer being a protective layer for the light sensitive layer and being disposed thereon. All the three layers are adhesively bonded together. The light-sensitive layer contains as the carboxyl-containing polymer thickener, a water insoluble copolymer of a monomer or a mixture of monomers having a neutral reaction with the carboxyl-containing monomer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007009835-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4485166-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7713429-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4621043-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008166659-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5114831-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006170747-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5061602-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4806449-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003129501-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8530139-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8137889-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4842987-A |
| priorityDate |
1976-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |