abstract |
A paste comprising particles of an inorganic oxide and a vehicle is printed on portions of a substrate which are not to be coated with a transparent electro-conductive film. A low valence oxide film of an electro-conductive metal oxide is deposited on the printed substrate by a vacuum deposition process. The resulting substrate is heated in an atmosphere containing oxygen, whereby the film is oxidized to form a transparent, highly electro-conductive film and the vehicle present in the paste is decomposed to yield a patterned, transparent electro-conductive film on the substrate. |