| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24926 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-68 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C7-00 |
| filingDate |
1978-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1979-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3173cde0c6d86ef3f52c856db8f9d97 |
| publicationDate |
1979-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4168168-A |
| titleOfInvention |
Method of making durable photomasks with metal ion diffusion |
| abstract |
A method of producing a durable photomask comprising, FORMING A SILVER IMAGE PATTERN IN A SILVER HALIDE EMULSION LAYER ON A GLASS SUPPORT BY IMAGEWISE EXPOSING THE EMULSION LAYER FOLLOWED BY DEVELOPMENT, REMOVING PATTERN-LIKE THE SILVER HALIDE EMULSION LAYER UTILIZING THE DIFFERENCE IN PROPERTY BETWEEN THE SILVER IMAGE-CONTAINING PORTIONS AND THE NON-SILVER IMAGE-CONTAINING PORTIONS OF THE EMULSION LAYER TO PARTIALLY UNCOVER THE SURFACE OF THE GLASS SUPPORT AT THE PORTIONS WHERE THE EMULSION LAYER WAS REMOVED, APPLYING A SILVER ION-SUPPLYING MATERIAL AND/OR A COPPER ION-SUPPLYING MATERIAL ON THE GLASS SUPPORT TO FORM A LAYER OF THE ION-SUPPLYING MATERIAL, AND HEATING THE GLASS SUPPORT AT A HIGH TEMPERATURE TO DIFFUSE THE METAL IONS INTO THE SURFACE OF THE GLASS SUPPORT AT THE UNCOVERED SURFACE PORTIONS OF THE GLASS SUPPORT. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6303262-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4269935-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5910398-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009011669-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4320217-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8492296-B2 |
| priorityDate |
1977-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |