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publicationDate 1979-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-4155866-A
titleOfInvention Method of controlling silicon wafer etching rates-utilizing a diazine catalyzed etchant
abstract A method for controlling the etch rate of a quaternary etchant comprising ethylene diamine, water, pyrocatechol and a diazine. The etching rate is catalyzed and controlled by controlling the amount of the diazine present in the etchant. A method for the controlled etching of silicon is also disclosed.
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