patent/US-4051437-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4051437-A

Outgoing Links

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assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b94d2715cda37c1f23e48f9f4f23422
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S136-29
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2656
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-265
filingDate	1976-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1977-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7925a793a2f87c1acfa50cb887c186fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f04cd84bb21557144782b0cbdeddfc7f
publicationDate	1977-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-4051437-A
titleOfInvention	Method and apparatus for semiconductor profiling using an optical probe
abstract	A method and apparatus of determining defects in semiconductors, by scann with small spot of light. As the semiconductor is scanned, a voltage is generated which may be used to indicate gross defects as well as the reduction in carrier lifetime due to the defects.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4712063-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4564808-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9211528-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4309657-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004212377-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4451785-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4520313-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5140272-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4567431-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4184111-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4301409-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4464627-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4333051-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE32388-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8401034-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4287473-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4841239-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4205265-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4442402-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4644264-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4646009-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4433288-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4786864-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4902966-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4857839-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6914442-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4599558-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4746856-A
priorityDate	1976-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 47.