| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42206fe75eab96a992861f84398e420e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28575
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30612 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| filingDate |
1976-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1977-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4ac23f4e88f244da9c66c0b53d7aef7 |
| publicationDate |
1977-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4049488-A |
| titleOfInvention |
Method of manufacturing a semiconductor device |
| abstract |
The invention relates to a method of manufacturing a semiconductor device in which an etching process is used so as to etch regions consisting of A III B V compounds selectively relative to each other. According to the invention in the etching process an etching bath is used having a water-dissolved oxidizing material and a reducing material constituting together a redox system. In such an etching bath with redox system the selectivity is established by the choice of the concentrations of the materials and of the pH. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4145478-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4662988-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4321613-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5194403-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4610759-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4923564-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4317125-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4325073-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5110765-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0176166-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4294651-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0136494-A1 |
| priorityDate |
1975-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |