http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4007047-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
filingDate 1975-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1977-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03c0fb135e26f5336d0fdcdcd85b0062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bdb4b977f5861b97f4a5067cd0aa345
publicationDate 1977-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-4007047-A
titleOfInvention Modified processing of positive photoresists
abstract Positive photoresist layers including a base soluble resin and a diazo ketone sensitizer are treated with hydrogen ion following initial exposure to achieve changes in the developed resist profile and/or development in a negative mode.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0042894-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4196003-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004025203-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004025203-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4180604-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006194155-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008079917-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4782008-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006177673-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008038671-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7794924-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7699337-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6691618-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8802878-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4308337-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004154489-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005037293-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4307178-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4981909-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8053180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4298803-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8133663-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4444869-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7799514-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4263106-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6796235-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4737425-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010047725-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4238559-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4359520-A
priorityDate 1974-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3126281-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3173788-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3522044-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2958599-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2994609-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3592646-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3201239-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3406065-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3533796-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3637644-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3264104-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3106465-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3046118-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3046121-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3779778-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127542760
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123506280
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421144547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10960
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129258501
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415747868
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128111725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID131718991
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1038
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6998
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9942114
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128125849
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129756315
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88589
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419590221
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129294975
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID134412408
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID172281
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421276477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76173
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452697243
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128028000
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431999234
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID585876
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19967803
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712566

Total number of triples: 90.