http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3997411-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-707 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-70 |
| filingDate | 1975-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1976-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93b17a20827b54e04aa5112490ab3360 |
| publicationDate | 1976-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-3997411-A |
| titleOfInvention | Method for the production of a thin film electric circuit |
| abstract | Method for the production of an electric thin-film circuit having a conductor path and at least one capacitor and/or one resistor, and comprising a substrate base member and the forming of a first tantalum-aluminum-alloy layer thereupon and etching the tantalum-aluminum-alloy layer to form the outline of the conductor path. A second tantalum-aluminum alloy layer is then laid on the first tantalum-aluminum-alloy layer and has a tantalum content of approximately 2 through 20 atomic percent at least in the area of the capacitor. An oxidation layer is formed upon the second tantalum-aluminum-alloy layer to constitute the capacitor dielectric. The conductor paths and the opposite capacitor electrode are formed of a conductive layer such as a nickel-chromium-gold layer which is applied as a surface layer and serves as a capacitor electrode and as conductor paths. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0139764-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7059041-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005052855-A9 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4344223-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4156647-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4251326-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102012109142-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004080919-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0139764-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4226932-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11143953-B2 |
| priorityDate | 1973-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.