| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-70 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00 |
| filingDate |
1973-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1976-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e6be6c91f21639315cad1b085a66909
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e067e829c6a10c4fd46c231b2c025762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7541bcd7a41b30106d157fe7c9798b6 |
| publicationDate |
1976-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3984186-A |
| titleOfInvention |
Projection masking system |
| abstract |
In the system disclosed, illuminating means form an optical path. An imaging system in the optical path includes a support for a mask, an imaging lens that focuses the image of the mask onto an optical plane, and a support that holds a component having a radiation-sensitive surface at the plane. A filter in the illuminating system blocks out light capable of affecting the radiation-sensitive material but allows passage of some visible light so that the image of the mask can be seen on the component. A half-mirror or beam splitter allows light from the imaging lens to focus on the component but deflects a portion of the light coming from the component toward an analyzer that detects the alignment between the image of the mask and the component. A second half-mirror or beam splitter near the first half-mirror compensates for radial shift of the image relative to the axis of the light path caused by the first half-mirror. The analyzer as well as the half-mirrors and the filter may be removed simultaneously after alignment to allow projection masking. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4422755-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4422754-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4597664-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5729330-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4072967-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4345836-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4473293-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4402596-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4577957-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4452526-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4577958-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0051567-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0111660-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4573791-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0111660-A2 |
| priorityDate |
1969-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |