| abstract |
An anodizing process includes depositing a first conductive layer on a dielectric layer; depositing a porous metal oxide-forming layer on the first conductive layer; anodizing the porous metal oxide-forming layer to provide porous anodized material; treating the first conductive layer to render it non-conductive. The process and articles fabricated thereby are especially suitable for use in multilevel metallurgical structures, and in electronic structures in which it is designed to have planar conductors. |