| abstract |
A specimen block which supports a specimen during inspection by both an optical and a scanning electron microscope, and further supports the specimen during a coating operation to enhance secondary electron and X-ray emission, has a planar base and an inclined surface upon which the specimen is to be mounted. During inspection by the scanning electron microscope, the specimen block is held by a standard specimen block holder and the specimen is held at the angle of the inclined surfaces with respect to the base of the holder. During the optical inspection and coating operations, the specimen block is held by a special holder having obliquely bored holes into which the specimen block will fit to compensate for the inclined surface and hold the specimen parallel to the base of the holder. In an alternate mode, the special holder can be used to hold a standard specimen block so that its specimen is at an angle with respect to the holder''s base, for inspection by a scanning electron microscope. |