abstract |
A fixture for retaining semiconductor discs during diffusion with a doping material including a hollow member with base and sidewalls, and a base plate located on the base of the hollow member with grooves therein for receiving the semiconductor discs in standing relation, in combination with retainer means extending between the sidewalls, the retainer means having slots therein for embracing the semiconductor discs in edge contact at a level which is at least as high as the center of gravity of the discs. |