http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3805734-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S118-90 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B31-10 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B31-10 |
filingDate | 1972-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1974-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1c6f431ebb7dcce767d4fae8e1caed2 |
publicationDate | 1974-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-3805734-A |
titleOfInvention | Device for the diffusion of doping material |
abstract | A device used for receiving semiconductor discs and doping material during a diffusion process which includes a heating step to diffuse the doping material into the semiconductor disc characterized by the semiconductor disc being arranged in small tubes formed of the same semiconductor material which small tubes are disposed in a larger tube formed of the same semiconductor material and containing the source of doping material. The small tubes are opened at least at one end which receives a supporting member to hold the disc in the proper position in the small tubes and the supporting member has a diameter less than the inner diameter of the tube and is formed of the same semiconductor material. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4820656-A |
priorityDate | 1971-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.