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filingDate 1972-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1974-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30922f28faa55a5bd5a3192547fc49ce
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publicationDate 1974-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-3790869-A
titleOfInvention Humidity sensitive semiconductor device
abstract A semiconductor composite having a rectifying and humidity sensitive characteristic is provided by depositing a tin oxide film on a semiconductor substrate, preferably with an insulating film of a semiconductor compound such as SiO2 of a thickness of 15A to 500A therebetween, and by exposing a portion of the barrier to the atmosphere. It was observed that the rectifying characteristic of the composite becomes easy at a quick response rate at an avalanche current region as the ambient relative humidity is increased and that the composite as supplied with a predetermined reverse bias voltage higher than a breakdown voltage of the composite shows a change in the reverse current at a quick response rate in reverse proportion to the relative humidity of the atmosphere. It was also observed that interposition of the insulating film between the SnO2 film and the semiconductor substrate in a preferred embodiment decreases the reverse leakage current, raises the reverse breakdown voltage and makes uniform the reverse breakdown voltage.
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priorityDate 1971-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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