| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a5809c5969fbb4f251effe88cb0d0b2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0585 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03G11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41M5-0029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03G11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41M5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| filingDate |
1971-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1973-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_976f15fcdfd3de7baa4d5071d924f339
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26b4eb0140ee0cd48e35efdf64ca85c8 |
| publicationDate |
1973-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3754912-A |
| titleOfInvention |
Chemical milling using fused powder particles as resist |
| abstract |
Method of chemical milling which comprises the steps of exposing a metal layer bearing a light-sensitive layer capable of developing a Rd of 1.0 to 2.2 to actinic radiation to produce a potential Rd of 1.0 to 2.2; developing said light-sensitive layer with water-insoluble powder particles using physical force to embed the powder particles in the light-sensitive layer; removing non-embedded powder particles; fusing the water-insoluble powder particles to the metal layer by heating to form a stencil; and etching through the metal layer in the areas unprotected by the fused water-insoluble powder particles. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4331712-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4356252-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4650288-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4304843-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4294909-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5204210-A |
| priorityDate |
1969-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |