| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cd8dff0cc6d024e095d5decaf9202f49 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-051 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
1971-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1973-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67b9a5156c45afca3fb0cc62764172cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be0c503c7503aa988ece9798177127ca |
| publicationDate |
1973-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3738881-A |
| titleOfInvention |
Anisotropic etching of silicon and germanium |
| abstract |
SINGLE CRYSTAL SILICON AND GERMANIUM HAVING MAJOR FACES PARALEL TO THE (100) PLANE MAY BE ETCHED ANISOTROPICALLY WITH AN ETCHANT COMPRISING AN OXIDIZING AGENT, AN ALCOHOL AND AN ALKALI METAL HYDROXIDE. IT HAS BEEN FOUND IN THE CASE OF SILICON THAT THE PRESENCE OF THE OXIDIZING AGENT IS NOT REQUIRED FOR ETCHING BUT INHIBITS THE FORMATION OF PYRAMIDS WHICH TERMINATE THE ETCHING PROCESS. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4680243-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011104875-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4996627-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5565060-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4013502-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5116464-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5431777-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4172005-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7419945-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3990925-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2372904-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7994062-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4918030-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6114248-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005239673-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4113551-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-2653901-A1 |
| priorityDate |
1971-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |