| abstract |
CERTAIN UNSATURATED PARTIAL ESTERS OF MALEIC ANHYDRIDE COPOLYMERS WITH CERTAIN MONO-VINYLIDENE COMPOUNDS ARE INSENSITIVE TO ACTINIC LIGHT BUT EXTREMELY SENSITIVE TO ELECTRONS. THIN COATINGS OF THESE COMPOSITIONS ARE INSOLUBILIZED WITH A RADIATION DOSE TO GREATER THAN 5X10**-7 COUL./ CM.2, WHICH IS A MARKED IMPROVEMENT OVER THE MATERIALS NOW USED AS THE ELECTRON-SENSITIVE RESIST FOR MAKING HIGH RESOLUTION PHOTOMASKS, MICROICRUITS, ETC. |