| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-916
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-158 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
1969-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1972-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1e0f5bb1b4eb8716160b1048d1bc4c6 |
| publicationDate |
1972-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3660180-A |
| titleOfInvention |
Constrainment of autodoping in epitaxial deposition |
| abstract |
Autodoping is minimized during epitaxial deposition by sputtering a primary or initial film on a doped semiconductor substrate prior to epitaxial deposition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4768071-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6776842-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4687682-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3915764-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4496609-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3982974-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5623739-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4095331-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3847686-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S576685-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-B361734-I5
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3839082-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3765940-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3929526-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6838359-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002081374-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4859626-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4894349-A |
| priorityDate |
1969-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |