http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3636303-A

Outgoing Links

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3593a335ede8bfed80bb10aef0e7ded
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
filingDate 1971-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1972-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91a73e3d11f350e0d98606caf4881bd0
publicationDate 1972-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-3636303-A
titleOfInvention Apparatus for metal vaporization comprising a reduced cross sectio heater and a refractory vessel
abstract An improved evaporation source for vacuum deposition of metals comprises a refractory vessel heated and supported by a separate heater. The vessel has a cavity to contain the metal to be evaporated and has a uniform wall thickness beneath the cavity. The heater comprises an electrically conductive refractory material shaped so as to support the vessel only at the ends thereof but to be in efficient heat transfer relationship therewith. Additionally, the heater has a reduced cross section between its ends in order to provide higher end contact area than cross-sectional area and to also prevent buckling when the heater is supported by axial compressive contacts.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4302508-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3239949-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008173638-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004074898-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7741584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2196301-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105483621-A
priorityDate 1971-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 30.