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filingDate 1969-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1972-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1972-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-3632439-A
titleOfInvention Method of forming thin insulating films particularly for piezoelectric transducer
abstract A film of an insulating compound is formed by evaporating the individual elements from separate sources while maintaining the substrate at a temperature in the range in which neither element will deposit if evaporated alone. A baffle disposed between the sources and the substrate prevents other than vaporized material from reaching the substrate. The film is very pure, may be highly oriented when formed on a suitable substrate, and is particularly useful for its piezoelectric properties.
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