http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3632439-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3492a7406879265b1f567f37d98dbbaf |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-076 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 |
filingDate | 1969-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1972-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4429ab65c2ecd7adcbd975980df2614e |
publicationDate | 1972-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-3632439-A |
titleOfInvention | Method of forming thin insulating films particularly for piezoelectric transducer |
abstract | A film of an insulating compound is formed by evaporating the individual elements from separate sources while maintaining the substrate at a temperature in the range in which neither element will deposit if evaporated alone. A baffle disposed between the sources and the substrate prevents other than vaporized material from reaching the substrate. The film is very pure, may be highly oriented when formed on a suitable substrate, and is particularly useful for its piezoelectric properties. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3874917-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3901182-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4310614-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6379747-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4482833-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7166168-B1 |
priorityDate | 1969-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.