| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14 |
| filingDate |
1969-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1971-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_139a9d24f309a8435236095fd2c51eca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7d62c8bf0881cbac37db6385fb8e1e4 |
| publicationDate |
1971-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3621812-A |
| titleOfInvention |
Epitaxial deposition reactor |
| abstract |
AN EPITAXIAL DEPOSITION REACTOR HAVING A CONICALLY DIVERGENT, REACTANT GAS OSUTLET WHICH CLOSELY OVERLAYS AND CIRCUMSCRIBES A SUBSTRATE WHICH IS SUPPORTED ON A GRAPHITE RESISTANCE HEATER. MEANS SHEATH THE REACTION ZONE WITH AN INERT GASEOUS ATMOSPHERE. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9388494-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013344245-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9666458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4979466-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758868-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012111271-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4041896-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11111581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0537854-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8778079-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011262117-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10287683-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11725282-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3745969-A |
| priorityDate |
1969-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |