http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3598084-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ca60276371938fd9344e126907e259e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S277-906 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-28 |
| filingDate | 1969-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1971-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34db6739dabf5f4a4090d5332e53cd20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfdb7bf4233c8f8fba580f765d99c47e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b680491bb60adfccad71064c29cb812e |
| publicationDate | 1971-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-3598084-A |
| titleOfInvention | Vapor deposition chamber including sealing and heating means |
| abstract | There are provided an apparatus, closure means therefore, for continuously effecting the pyrolytic deposition of boron on an electrically conductive substrate. The apparatus comprises a vertical tubular reactor chamber, novel closure means on both the top end and bottom end of the chamber which operate by capillary principle to retain an electrically conductive fluid serving as both a seal and an electrical contact for heating purposes and which include passageways for cooling and reactant gases, inlet means for feeding cooling and reactant gases into the reactor through said closure means, and outlet means for exiting excess cooling and reactant gases and byproduct gases from said chamber. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4031851-A |
| priorityDate | 1969-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.