| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94fff2216f5a387cfbeff2f1a7331cd4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-28 |
| filingDate |
1967-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1971-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42260abf2087d1e76c4a3a1c315325fa |
| publicationDate |
1971-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3562040-A |
| titleOfInvention |
Method of uniformally and rapidly etching nichrome |
| abstract |
A PROCESS FOR FABRICATING A NICHROME THIN FILM RESISTOR AS AN INTEGRAL PART OF A SEMICONDUCTOR INTEGRATED CIRCUIT. THE NICHROME RESISTOR IS DEPOSITED ON A LAYER OF SILICON DIOXIDE GROWN OR DEPOSITED ON THE SEMICONDUCTOR SURFACE; ALUMINUM CONTACTS ARE DEPOSITED ON THE NICHROME RESISTANCE ELEMENT AND ALLOYED THERETO. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4481263-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4480261-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3942244-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1474811-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1474811-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0318724-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CH-674851-A5
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3886578-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2210881-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4420504-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7250348-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4944807-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3654526-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4200975-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5374338-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0072456-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5472735-A |
| priorityDate |
1967-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |