| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a6a69da5879eb83f56f6876dba3e3cf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-909
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12528 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
1966-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1970-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f47b95032ba8092ac77baa5b877f1605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e8b393374096f418f4e3033845a7a90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e132949c8540bb17f9a671c55d41179
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5618bd6d8402e82a50741d49e03f6585 |
| publicationDate |
1970-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3519479-A |
| titleOfInvention |
Method of manufacturing semiconductor device |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3675619-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3857169-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3927638-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3664874-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3754168-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4782034-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3793068-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4871617-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3642526-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4794019-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4584207-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4830982-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4207834-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3841904-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5391394-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5180432-A |
| priorityDate |
1965-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |