Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d202e9e866984fe229f6facc38f1d740 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S117-90 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-905 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
filingDate |
1962-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1966-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18c8f8cc7964aabd01c182eb29e60493 |
publicationDate |
1966-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-3279946-A |
titleOfInvention |
Hydrogen chloride treatment of semiconductor coating chamber |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0633997-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6830631-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004118810-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6855207-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6715497-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4889589-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3436261-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6151447-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100744224-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010151682-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6310327-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5710407-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0163002-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5820686-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3438810-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003155000-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8071477-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0633997-A4 |
priorityDate |
1962-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |