| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3492a7406879265b1f567f37d98dbbaf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1667
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-907 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 |
| filingDate |
1959-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1963-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9abab1a9ad35c98f252335a9be78f8cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eaa8c18ca0268fe51cc3ba04e9c4e7c |
| publicationDate |
1963-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3075892-A |
| titleOfInvention |
Process for making semiconductor devices |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3172829-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3544395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3199189-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3392052-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4247579-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3240601-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3450958-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008277285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3328272-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10407791-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3386893-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2009143-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4519144-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3661727-A |
| priorityDate |
1959-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |