| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cd8dff0cc6d024e095d5decaf9202f49 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate |
1959-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1961-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78745ffbb811d515e25939e94de31e61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e57fb7a17ef9535814bca217da5372b |
| publicationDate |
1961-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3012920-A |
| titleOfInvention |
Process of selective etching with resist preparation |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3526555-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3193418-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3135638-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3326729-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3442012-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4765865-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3151379-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3813762-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005167281-A1 |
| priorityDate |
1959-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |