| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa85b9509fe8e25d0162494c3a8bd37a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06 |
| filingDate |
2022-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6eb6a2e1180246ca175091899d7c11d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50f893c8e745fb30c6b190c1c3aa2179
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_283a029dfa87e0bb45cd9639eb770ad8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af497d24fd7b3ad59e8ff8a6fa1948c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3881ff0cdaf0ac9b479a54899d30b5b7 |
| publicationDate |
2023-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2023019365-A1 |
| titleOfInvention |
Aluminum precursor compound, production method therefor, and aluminum containing layer forming method using same |
| abstract |
The present disclosure relates to an aluminum compound, an aluminum-containing film-forming precursor composition including the aluminum compound, and a method of preparing an aluminum-containing film using the aluminum-containing film-forming precursor composition. |
| priorityDate |
2020-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |