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filingDate 2020-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2022367749-A1
titleOfInvention Semiconductor optical device and method of producing the same
abstract Provided is a method of producing a semiconductor optical device that makes it possible to improve the optical device properties of the semiconductor optical device including semiconductor layers containing at least In, As, and Sb. The method has a first step of forming an etching stop layer on an InAs growth substrate; a second step of forming a semiconductor laminate; a third step of forming a distribution portion; a fourth step of bonding the semiconductor laminate and the distribution portion to a support substrate with a metal bonding layer therebetween; and a fifth step of removing the InAs growth substrate.
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