| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-45031 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-4099 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B19-4099 |
| filingDate |
2022-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7a4c933cde3d7f470d0aba762a8c1eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd2914217d408f3d5702f2675f2ed70c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d6af8a2b201683ed579b2eb08681dc3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de812c86a080f671c9ea8303d95885cd |
| publicationDate |
2022-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2022334554-A1 |
| titleOfInvention |
Large spot spectral sensing to control spatial setpoints |
| abstract |
A large beam spot spectral reflectometer system for measuring a substrate is provided. Hardware components for collecting in situ large beam spot optical signals is disclosed. Machine learning models for denoising large beam spot optical signals are disclosed. Machine learning models for interpreting in situ optical data and facilitating process control are also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023102438-A1 |
| priorityDate |
2021-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |