http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022317078-A1

Outgoing Links

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc
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filingDate 2020-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bb0e1eee1d092094941eb44afe177f5
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publicationDate 2022-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2022317078-A1
titleOfInvention Sensor, including a diaphragm that is open through a clearance, for measuring the concentration of an analysis fluid
abstract A sensor for measuring a concentration of an analysis fluid based on a thermal conductivity principle. The sensor includes at least one analysis heating element, situated on a measuring diaphragm, for heating the analysis fluid, and a reference heating element, situated on a reference diaphragm, for heating at least one reference gas. The measuring diaphragm and the reference diaphragm are adjacently situated between a sensor substrate and a cap substrate. The measuring diaphragm is situated in a measuring volume and the reference diaphragm is situated in a reference volume. The measuring diaphragm and the reference diaphragm each include at least one coating. The measuring diaphragm is opened by at least one clearance. A method for manufacturing a sensor is also described.
priorityDate 2019-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Incoming Links

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Total number of triples: 18.