http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022311206-A1

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filingDate 2020-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b28d97106fef25bf1b3ab2a89c34823a
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publicationDate 2022-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2022311206-A1
titleOfInvention Semiconductor laser device structures and methods of fabrication thereof
abstract Semiconductor device structures comprising laser diode cavities with at least one of a mode-selective filter and a phase-alignment element, and methods for their fabrication, are disclosed. An example device structure comprises a surface-etched grating distributed-feedback (SEG DFB) laser with a mode-selective reflector structure. The reflector structure is designed to provide higher pot feedback of the fundamental TE0 mode and suppression of higher order mode effects. The reflector structure may be a single interface (single facet) mirror type reflector comprising a spatially patterned reflector, or a multi-interface distributed Bragg reflector (DBR). A phase alignment element may be included to provide precise optical phase control. A photodetector for back-facet power monitoring may be included. A method of fabrication is disclosed, based on a self-aligned process in which DBR features are included on the same mask that is used for the DFB laser grating.
priorityDate 2019-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 28.