http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022270887-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_672353c0d98d612ecd91ef89b75f2e83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30635 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063 |
| filingDate | 2020-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75031dfb0bd1999ea0c4a4adc4bda6bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_846a10a642c630ed64a2da3ff8a1e4f7 |
| publicationDate | 2022-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2022270887-A1 |
| titleOfInvention | Method for manufacturing structure |
| abstract | There is provided a method for manufacturing a structure, including: n applying a first etching to a surface of a member, at least the surface being composed of Group III nitride; and applying a second etching to the surface to which the first etching has been applied, wherein in applying the first etching, a flat portion and a protruding portion are formed, the flat portion being newly appeared on the surface by etching, and the protruding portion being raised with respect to the flat portion, which is caused by being less likely to be etched than the flat portion, and in applying the second etching, the protruding portion is lowered by etching the protruding portion. |
| priorityDate | 2019-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.