| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f0c17fb0be15e18e811be589c822b4c8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0927
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B19-0014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2933-0058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0961
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2027-0178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-36 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0905
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0916
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-082 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-06 |
| filingDate |
2022-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24fdb2634cda3ea849f5609c53db49ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_147b6ba82e1040cb74ba010e4c9ffecf |
| publicationDate |
2022-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2022266385-A1 |
| titleOfInvention |
Microlens arrays for parallel micropatterning |
| abstract |
Disclosed herein are systems and methods for using microlens arrays for parallel micropatterning of features. In some embodiments, a system includes a laser that emits a laser beam, a beam homogenizer configured to shape the laser beam into a shaped laser beam having a beam profile, and a lenslet array. The beam homogenizer shapes the laser beam such that at least a portion of the beam profile is substantially uniform in power. The lenslets of the lenslet array have the same shape and each receive a respective portion of the shaped laser beam to output a plurality of laser sub-beams. The plurality of laser sub-beams can be directed toward one or more layers of material to generate or modify a plurality of features on the one or more layers in parallel. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021335748-A1 |
| priorityDate |
2019-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |