http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022259734-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45534
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-2284
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-2224
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
filingDate 2021-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_decb2eaa563e50c8d83c1d9e918e2c3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b931b12aa024a74c06ca3d307f4db0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cf1b98a2394e15bc7c22bce8c2f83f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67aba3dc88660c4d25b4a2af7573bed3
publicationDate 2022-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2022259734-A1
titleOfInvention Reducing Agents for Atomic Layer Deposition
abstract Methods of forming a metal film having a metal halide with a reducing agent are disclosed. The reducing agent, the reducing agent includes a group IV element containing heterocyclic compound, a radical initiator, an alkly alane, a diborene species and/or a Sn(II) compound.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112384639-A
priorityDate 2021-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021123136-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015004316-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019144998-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID478821565
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID478821564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID478787580
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID478787547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20661035
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422833124

Total number of triples: 41.