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filingDate 2020-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9321233e237e29e730fc4a09108724fc
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publicationDate 2022-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2022213243-A1
titleOfInvention Polymer, Resist Composition, Method for Manufacturing Substrate Having Pattern Formed Therein, and (Meth)Acrylic Ester and Production Method Therefor
abstract Provided is a polymer including a constituent unit (1) based on a monomer represented by Formula (1), in which a content of a constituent unit based on a monomer having a polycyclic structure is 35 mol % or less. In Formula (1), R 1 represents a hydrogen atom or a methyl group, A 1 represents a linking group including an ester bond, or a single bond, where A 1 has no tertiary carbon atom, and Z 1 represents an atomic group forming a sulfur-containing cyclic hydrocarbon group having 3 to 6 carbon atoms, which includes a carbon atom bonded to A 1 , and —SO 2 —.
priorityDate 2019-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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