http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022205083-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-062 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate | 2021-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b6b5c39a82a420b4e36157a8c9b0552 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07f6ed8ccc9497566c5c1fdb0c168556 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f2cc51f9c80f31fd04ae40dab9d5c50 |
| publicationDate | 2022-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2022205083-A1 |
| titleOfInvention | Compositions for depositing material, synthesis methods and uses |
| abstract | The current disclosure relates to a composition for depositing group 13 metal-containing material on a substrate. The composition comprises a metal alkyl precursor, wherein the metal alkyl precursor comprises a group 13 metal atom and two different alkyl ligand types. The first ligand type is a branched C4 to C8 alkyl bonded to the group 13 metal atom through a carbon atom that is bonded to three carbon atoms, and the second ligand type is a linear C1 to C4 alkyl. The group 13 metal atom is bonded to two ligands of the first ligand type, and the ratio of first ligand type to second ligand type in the composition is about two to one. Further, the disclosure relates to methods of manufacture of compositions and their uses, as well as methods of depositing material on a substrate. |
| priorityDate | 2020-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 63.