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filingDate 2020-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2022199773-A1
titleOfInvention Condensed source or drain structures with high germanium content
abstract Integrated circuit structures having condensed source or drain structures with high germanium content are described. In an example, an integrated circuit structure includes a vertical arrangement of horizontal nanowires. A gate stack is around the vertical arrangement of horizontal nanowires. A first epitaxial source or drain structure is at a first end of the vertical arrangement of horizontal nanowires. A second epitaxial source or drain structure is at a second end of the vertical arrangement of horizontal nanowires. Each of the first and second epitaxial source or drain structures includes silicon and germanium, with an atomic concentration of germanium greater at a core of the epitaxial source or drain structure than at a periphery of the epitaxial source or drain structure.
priorityDate 2020-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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