| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eccd894c99fea2d1c0c8735872bb2309 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2022-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ffbf2423377f34f36504bcd1b3e34c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01bef1bec70d86b207c677f329aebd4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e77910850b245080e3d9329f71757642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_281e77b7f9f0ed7a68949421c8507a11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a57759a6e5056d985323ecbd5431b58 |
| publicationDate |
2022-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2022194963-A1 |
| titleOfInvention |
Metal Complexes Containing Cyclopentadienyl Ligands |
| abstract |
Metal complexes including cyclopentadienyl ligands and methods of using such metal complexes to prepare metal-containing films are provided. |
| priorityDate |
2016-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |