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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51eb273df1d33eeed4d6381d334e6db4
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publicationDate 2022-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2022165841-A1
titleOfInvention Dynamic random access memory capacitor and preparation method therefor
abstract A Dynamic Random Access Memory (DRAM) capacitor and a preparation method therefor are provided. The DRAM capacitor includes a dielectric layer, and the dielectric layer includes a high dielectric material layer, and low dielectric loss material layers provided on both side surfaces of the high dielectric material layer.
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