http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022163888-A1

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2006
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filingDate 2020-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ffbbe12d2b563a94b8228a4bb8e5dec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f4ff5734e5992597b708bf6898c986d
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publicationDate 2022-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2022163888-A1
titleOfInvention Positive type resist composition and method for manufacturing resist pattern using the same
abstract A positive type resist composition capable of forming a pattern shape suitable for lift-off is provided. A positive type resist composition comprising (A) a certain polymer, (B) an acid generator having an imide group, (C) a dissolution rate modifier and (D) a solvent.
priorityDate 2019-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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