| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8809
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-1493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0038 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-1434
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-1425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0227 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-14 |
| filingDate |
2021-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20566b438d2b1bfd6e11d268afea6022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_085da3d545794ed1dd99ba110f8ef2c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79631a8a6755f9cd84d64450434794b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e494c58a95ce8854e7d1fa37331736bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7578634c47ecb5d1968c0334a3428193
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01267415044fc427e159b77615d4aa7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f08a60dd1f680a51021a931ba7ade3f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec25900b586b04978d7ddfe1208d0bb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c461cb409e9d2bb54040cfff7550a169
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4849c3b794618dd88cf4b4679fac131a |
| publicationDate |
2022-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2022120662-A1 |
| titleOfInvention |
Particle inspection device based on spatial modulation method and particle inspection method using the particle inspection device |
| abstract |
A particle inspection method includes irradiating a spatially modulated modulation beam onto a surface of a substrate and detecting an absorption light signal from a reflection beam generated through reflection of the spatially modulated modulation beam by the substrate. |
| priorityDate |
2020-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |